Array of Chromium Doped Nanostructured TiO2 Metal Oxide Gas Sensors
نویسندگان
چکیده
منابع مشابه
Miniaturized ceramic platform for metal oxide gas sensors array
In work is developing an ultra-fast, low cost and technology flexible process for production array of ceramic MEMS microhotplates for using in semiconductor gas sensors orientated to small series applications, where is sufficient to produce 10-100 samples with a different layout of heaters and membrane per day.
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2014
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2014.11.345